High-k Hf-based layers grown by RF magnetron sputtering

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

L. Khomenkova, C. Dufour, P.-E.Coulon, C. Bonafos, F. Gourbilleau // Nanotechnology.-2010. V.21.-P. 095704.

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