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Uvarov V.S., Prudnikov A.M., Fedorenko L.L., Medvid А., Onufriev P., Pashchenko A.V. ХVI International Conference on Physics and Technology of Thin Films and Nanosystems,Ivanо-Frankivsk, May 15-20, 2017, P.328.
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V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
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Research divisions Publications lab05-2 lab05-2-2017 The modifications of structure of carbon – nitride CNx films under the pulsed laser irradiation impact.
Research divisions Publications lab05-2 lab05-2-2017 The modifications of structure of carbon – nitride CNx films under the pulsed laser irradiation impact.