- Деталі
- Перегляди: 6068
O. Yilmazoglu, L. Considine, R. Joshi, H. Mimura, D. Pavlidis, H.L. Hartnagel, J.J. Schneider, A. Evtukh, M. Semenenko, V. Litovchenko // Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 30, iss. 4, article no. 042203 (2012)