Auger–spectrocsopic investigation of a-C:H films on silicon microrelief substrates

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

A.V. Vasin, E.F. Venger, L.A. Matveeva, T.Ya. Gorbach, S.V. Svechnikov // Carbon, v.36, №5-6, p.513-515 (1998)

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