Auger-Spectroscopic Investigation of a-C:H Films on Micro-Roughness Substrates

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

A.V. Vasin, T.Ya. Gorbach, A.G. Gontar, A.M. Kutsay // Journal of Chemical Vapor deposition, v.6, №1 (1997)

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