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N. Korsunska, L. Borkovska, Yu. Polischuk, O. Kolomys, P. Lytvyn, І. Markevich, V. Strelchuk, V. Kladko, O. Melnichuk, L. Melnichuk, L. Khomenkova, C. Guillaume, X. Portier // MaterialsScienceinSemiconductorProcessing. – 2019. – Vol. 94. – P. 51 – 56. DOI: https:doi.org/10.1016/j.mssp.2019.01.041.