Fabrication and Properties of ITO Films Treated by Excited Atomic Oxygen

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

V.A. Sterligov, E.V. Shun’ko, I.O. Grytsaienko, L.V. Poperenko // Appl. Opt. V.51, N.12, pp.1997-2003 (2012)

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