ZnO thin films obtained by atomic layer deposition as a material for photovoltaics

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

SemikinaT.V., MamykinS.V., SheremetG.I., ShmyrevaL.N // Ukr. J. Phys. – 2016. - Vol. 61, N 8. - P.732-740.

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