V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine

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. Klyui, V. Ya Bratus, V.P. Temchenko, V.B. Lozinskii, V.O. Yukhymchuk, Wei Han, B. Liu // Materials Science in Semiconductor Processing (2017) 71:232-239, DOI 10.1016/j.mssp.2017.08.006