V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine

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P.N. Okholin , V.I. Glotov, A.N. Nazarov , V.O. Yuchymchuk , V.P. Kladko, S.B. Kryvyi, P.M. Lytvyn, S.I. Tiagulskyi, V.S. Lysenko, M. Shayesteh, R. Duffy // Materials Science in Semiconductor Processing. 42 (2016) 204–209.