Single electron transistors with hydrogen treatment of ALD SiO2 in nanoscale metal–insulator

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Single electron transistors with hydrogen treatment of ALD SiO2 in nanoscale metal–insulator–metal tunnel junctions

G. Karbasian, M. S. McConnell, A. O. Orlov, A. N. Nazarov and G. L. Snider // Nanotechnology, 2017. – V.28, - N 21.

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