V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine

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G.S.Pekar , A.F.Singaevsky. // Materials Science in Semiconductor Processing, Vol. 64, 15 June 2017, P. 10–15. http://dx.doi.org/10.1016/j. mssp.2017.02.026.