Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing

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A.V. Fomin, G.A. Pashenko, M.Yu. Kravetskyi, I.G.Lucyshyn // Semiconductor Physics, Quantum Electronics & Optoelectronics, V.20, № 1, P.118–122, (2017)

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