Nanocluster NVM Cells Metrology: Window formation, Relaxation and Charge Retention Measurements

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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V. A. Ievtukh, A. N. Nazarov, V. I. Turchanikov and V. S. Lysenko, Vol. 718-720, Advanced Materials Research pp 1118-1123 (2013)

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