V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine

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В.С. Лысенко, Т.Е. Руденко, А.Н. Назаров, Л.Н. Манькова и др.// Микроэлектроника, т.13, №3, C.252-259 (1984)