Stress mapping on the porous silicon microcapsules by Raman microscopy

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Naumenko D., Snitka V., Duch M., Torras N., Esteve J // Microelectronic Engineering. – 2012. – V.98. – P. 488-491

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