V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine

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Scotti G., Trusheim D., Kanninen P., Naumenko D., Shulz-Ruhtenberg M., Snitka V., Kallio T., Franssila S.  // Journal of Micromechanics and Microengineering. – 2013. – V.23(5). – P.055021.