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V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
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Research divisions Publications dep07-1 dep-07-2014-1 Structural and electrical properties of oxygen complexes in Cz and FZ silicon crystals implanted with carbon ions.
Research divisions Publications dep07-1 dep-07-2014-1 Structural and electrical properties of oxygen complexes in Cz and FZ silicon crystals implanted with carbon ions.