The nanostructuring of surfaces and films using interference lithography and chalcogenide photoresist

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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V.A.Dan`ko, I.Z. Indutnyi, V.I. Myn’ko, P.E. Shepeliavyi, M.V. Lykanyuk // Nanoscale Research Letters, 2015, Volume 10, Issue 1, :83.

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