Improvement of degradation stability of silicon nanostructures by deposition of diamond-like carbon films

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Improvement of degradation stability of silicon nanostructures by deposition of diamond-like carbon films

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N.I. Klyui, M.A. Semenenko, I.M. Khatsevich, A.V. Makarov, A.N. Kabaldin, F.V. Fomovskii, Wei Han // Semiconductors, 2015, Vol. 49, No. 8, pp. 1056–1060

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