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V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
Research divisions Publications dep15 dep-15-2016 RF plasma treatment of shallow ion-implanted layers of germaniumP.N. Okholin, V.I. Glotov, A.N. Nazarov, V.O. Yuchymchuk, V.P. Kladko, S.B. Kryvyi, P.M. Lytvyn, S.I. Tiagulskyi, V.S. Lysenko, M. Shayesteh, R. Duffy // Materials Science in Semiconductor Processing, – 2016. - v.42. - pp. 204-209.
