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Serhii B. Kryvyi, Petro M. Lytvyn, Vasyl P. Kladko, Hryhorii V. Stanchu, Andrian V. Kuchuk, Yuriy. I. Mazur, Gregory J. Salamo, Shibin Li, Pavlo P. Kogutyuk, and Alexander E. Belyaev. // Journal of Vacuum Science & Technology B, V.35, Issue 6, 062902 (2017). http://dx.doi.org/10.1116/1.4999468