Деталі

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A.P. Shapovalov, I.V. Korotash, E.M. Rudenko, F.F. Sizov, D.S. Dubyna, L.S. Osipov, D.Yu. Polotskiy, Z.F. Tsybrii, A.A. Korchovyi, "Structure and optical properties of AlN films obtainedusing the cathodic arc plasma deposition technique" / Semiconductor Physics, Quantum Electronics & Optoelectronics, V. 18, N 2. p. 117-122 (2015). doi: 10.15407/spqeo18.02.117.