V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine

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A. I. Gudymenko, R.K.Savkina, A.B. Smirnov, V.A. Morozhenko, A. S. Nikolenko, M.I. Smoliy,  T.G.Кryshtab // Surface and Coating Technology, Vol.343,  P. 17-23 (2018)