V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine

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Iu. Nasieka, L. Rashkovetskyi, O. Strilchuk, V. Maslov, E. Venger// Nuclear Instruments and Methods in Physics Research, Section B: Beam interactions with Materials and Atoms, B290, P. 26–29 (2012)