Chemical-dynamic polishing of semiconductor materials based on Bi and Sb chalcogenides by HNO3

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Chemical-dynamic polishing of semiconductor materials based on Bi and Sb chalcogenides by HNO3–HCl solutions

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I.I. Pavlovich, Z.F. Tomashik, I.B. Stratiychuk, V.M. Tomashik, O.A. Savchuk, A.S. Kravtsova // Semiconductor Physics, Quantum Electronics &Optoelectronics, V.14, N 2, Р. 200-202, (2011)

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