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V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
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Research divisions Publications dep07-1 dep-07-2014-1 Photoluminescence and Raman scattering behavior of Si rich silicon oxynitride films annealed at different temperatures.
Research divisions Publications dep07-1 dep-07-2014-1 Photoluminescence and Raman scattering behavior of Si rich silicon oxynitride films annealed at different temperatures.