Residual Deformations and Mechanical Stresses in Macroporous and Nonporous Silicon under Normal Etching Conditions

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Residual Deformations and Mechanical Stresses in Macroporous and Nonporous Silicon under Normal Etching Conditions

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K.P. Konin; O.Yo. Gudymenko; V.P. Kladko; O.O. Lytvynenko; D.V. Morozovs'ka // Journal of Electronic Materials, 2020, V.49, Issue 9, P.5240-5243.

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