Generation and Auto-Revealing of Dislocations in Si During Macropore Etching

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

Konin K.P., Gudymenko O.Yo., Kladko V.P., Lytvynenko O.O., Morozovs’ka D.V. // Journal of Electronic Materials, Vol.47, №9, P.5113–5117 (2018).

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