Comparative study of annealing and oxidation effects in SiC:H and a-SiC thin films deposited by radio-frequency magnetron sputtering techniques

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A.V. Vasin, Sh. Muto, Yu. Ishikawa, A.V. Rusavsky, T. Kimura, V.S. Lysenko, and A.N. Nazarov. Thin Solid Films, V.519, No.7, P. 2218–222, (2011)