Comparative study of annealing and oxidation effects in SiC:H and a-SiC thin films deposited by radio-frequency magnetron sputtering techniques

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

A.V. Vasin, Sh. Muto, Yu. Ishikawa, A.V. Rusavsky, T. Kimura, V.S. Lysenko, and A.N. Nazarov. Thin Solid Films, V.519, No.7, P. 2218–222, (2011)

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