Hydrogen plasma treatment of silicon thin-filn structures and nanostructured layers

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A.N. Nazarov, V.S. Lysenko, T.M. Nazarova, Semiconductor Physics, Quantum Electronics & Optoelectronics, V. 11, N 2, pp. 101-123 (2008)