Сarbonization of porous silicon for 3С-SiC growth

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A. Vasin, Y. Ishikawa, N. Shibata, J. Salonen, V-P. Lehto, Materials Science Forum, Vols. 556-557, pp. 167-170, (2007)