- Details
- Hits: 6259
Y. Gomeniuk, A. Nazarov, Ya. Vovk, Yi Lu, O. Buiu, S. Hall, J.K. Efavi, M.C. Lemme, Materials Science in Semiconductor Processing, vol. 9, pp. 980–984 (2006)
V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
Y. Gomeniuk, A. Nazarov, Ya. Vovk, Yi Lu, O. Buiu, S. Hall, J.K. Efavi, M.C. Lemme, Materials Science in Semiconductor Processing, vol. 9, pp. 980–984 (2006)