Rare earth implantation for silicon based light emission

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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W.Skorupa, J.M.Sun, S.Pruchnal, L.Rebohle, T. Gebel, A.N.Nazarov, I.N.Osiyuk and M.Helm, Solid State Phenomena, V.108-109, P.755-760, (2005)