Deposition of boron nitride films by PVD methods: transition from h-BN to c-BN

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

Search

Details: Hits: 6483

Djouadi M.-A., Vasin A.V., Nouveau C., Angleraud B., Tessier P.-Y. Surface and Coatings Technology №180-181, pp.174-177. (2004)