Aluminium nitride films deposited by reactive triode sputtering for surface acoustic wave device application

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Mortet V., Vasin A., Jouan P-Y., Elmazria O., Djouadi M-A.. Surface and Coating Technology V.176, №1, pp.88-92, (2003)