Enhanced activation of implanted dopant impurity in hydrogenated crystalline silicon

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

Search

Details: Hits: 6135

A.N.Nazarov, V.M. Pinchuk, T.V. Yanchuk, V.S. Lysenko and S. Ashok, Phys. Rev. B, V. 58, N7, P. 3522-3525 (1998)