SIMS study of deuterium distribution and thermal stability in ZMR SOI structures

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A. Boutry-Forveille, D. Ballutaud, and A. N. Nazarov, , Semiconductor Physics, Quantum Electronics & Optoelectronics, V. 1, N 1, P. 108-111 (1998)