Flash Lamp Annealing and RF Plasma Annealing of Al-Si02-Si Structures

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A. N. Nazarov, V. S . Lysenko, S. A. Valiev, M. M. Lokshin, A. S. Tkachenko, and I. A. Kunitskii, phys. stat. sol. (a) vol.120, pp.447-456 (1990)