RF Plasma Modification of Heavily Destroyed Ion Implanted Subsurface Silicon Layers

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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V. S. Lysenko, A. N. Nazarov, I. M. Zaritskii, G. Serfozo, G. Battistig, J. Gyulai, and L. Dozsa, phys. stat. sol. (a) , vol.115, pp.75-80 (1989)