Manifestation of Hydrogen in Al-Si02-Si Structures Subjected to a RF Plasma Annealing

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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V.S. Lysenko, A.N. Nazarov, G.A. Naumovets, V.B. Popov, and A.S. Tkachenko, phys. stat. sol. (a) vol.112, K9-K12 (1989)