Transformation of Si-SiO2-Al structures under RF plasma treatment

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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V.S.Lysenko, I.N.Osiyuk, V.I. Turchanikov, A.N.Nazarov, Appl. Surf. Science, vol.39, N2, pp.388-391. (1989)