Enhanced activation of implanted phosporus in Si under RF plasma treatment

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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M.Ya. Valakh, V.S. Lysenko, G.Yu. Rudko, N.E. Shahraychuk, A.N. Nazarov, Nucl. Instr. Meth. Phys. Res. (B), vol.44, N3, pp.146-148 (1989)