The Influence of Defect Surface Layers on the Capacitive Properties of MOS Structures

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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R. N. Litovskii, V. S. Lysenko, A. N. Nazarov, T. E. Rudenko, S. B. Kaschieva, and N. R. Nedev, phys. stat. sol. (a) vol.77, pp.699-707 (1983)