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Lysenko V. S., Sytenko T. N., Zimenko V. I., Tyagulskii I.P., Snitko O. V., Structures Implanted with Boron Ions at Various Implantation Energies, Phys. Stat. Sol. (a), v.59, p. 115-119 (1980)
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V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
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