High-density data recording via laser thermo-lithography and ion-beam etching

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

Gorbov I.V., KryuchynA.A., GrytsenkoK.P., MankoD.Yu., BorodinYu.O.// Semicond. Physics, Quantum Electronics & Optoelectronics vol.17 pp52-55 (2014)

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