Protective applications of vacuum-deposited perfluoropolymer films.

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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K. Grytsenko, Yu. Kolomsarov, O. Belyaev, S. Schrader // Semicond. Phys,, Quantum Electronics & Optoelectronics v.19, pp.139-148 (2016).