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A. I. Gudymenko, R.K.Savkina, A.B. Smirnov, V.A. Morozhenko, A. S. Nikolenko, M.I. Smoliy, T.G.Кryshtab // Surface and Coating Technology, Vol.343, P. 17-23 (2018)
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V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine
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