Mechanism of generation of defects in a semiconductor by pulse laser radiation

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A. Medvid, Y. Hatanaka, V. Litovchenko, L. Fedorenko, D. Korbutyak, S. Krylyuk. // Material Science Forum, V.384-385, P.291-296 (2002)