Capacitive Properties of MIS Structures with SiOx and SixOyNzFilms Containing Si Nanoclusters

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A. Evtukh, O. Bratus’, V. Ilchenko, V. Marin, I. Vasyliev //Journal of Nano Research.- 2016, Vol. 39, pp 162-168.